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MEMS Mirror
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Product Introduction

 

MEMS Mirror

 

Capacitive Type

Tilt Angle : ±2.25 deg

Chip Size : 1.9 mm X 3.2 mm X 0.5 mm

Mirror Size : φ1 mm

Operating Temp : -5 to 75 deg

Resonant Frequency : >1000 Hz

Drive Voltage : <60 V

Supplier

Sumitomo Precision Products Co., Ltd. (SPP) is an integrated manufacturer of aerospace equipment, heat exchangers, hydraulic controls, wireless sensor networks, sensors, micro-electronics technology, and environmental systems. The aerospace division supplies its products to aerospace industries worldwide, including Boeing, Airbus, Bombardier, and Embraer.

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